Data Science | Physics Internship: Machine Learning in EUV Imaging

Introduction

The Performance and Validation team is one of the pillars of EUV Imaging and is responsible for assessing the performance of ASML machines through advanced testing and analysis. Imaging is the diffraction-based formation of images on the wafer and is the ultimate purpose of ASML scanners, with multiple factors contributing to final image quality. As customers continue to adopt new technology nodes, there is a growing need to push imaging performance further. This internship contributes by exploring how machine learning and data analytics can help predict imaging performance. By doing so, the team aims to reduce testing effort while supporting faster technology development.

Your assignment

The goal of this internship is to use machine learning techniques together with large volumes of experimental and diagnostic data collected from ASML systems. You will work on building models that can predict imaging performance without the need to execute physical tests. This approach offers opportunities to increase factory output, accelerate development of new technology nodes, and enable performance optimization across a fleet of systems. Your main responsibilities will be:

• Analyze large datasets from system sensors and experimental imaging measurements.
• Develop machine learning models to predict imaging performance on the wafer.
• Investigate how well models generalize across different features and system conditions.
• Compare model predictions with existing measurement results and identify limitations.
• Collaborate closely with engineers to connect physical imaging concepts with data-driven models.
• Explore opportunities to reduce or replace physical tests using model predictions.
• Document and present results clearly to support further development and decision-making.

This internship allows you to strengthen your machine learning skills while gaining insight into imaging physics and state‑of‑the‑art lithography systems. You will work closely with experienced engineers, receive mentoring, and contribute to a project with strong relevance for ASML and its customers.

This is a bachelor or master non-thesis internship for minimum 5-6 months, 3-5 days per week (2-3 days on-site). The start date of this internship is as of September 2026.

Your profile

To be suitable for the internship, you:

• Are enrolled in a bachelor’s or master’s degree program in data science, physics, computer science, mathematics, or a related field.

• Have experience with programming (Python).

• Are curious and motivated to work on a challenging project that has the potential of being a major game-changer for the industry while gaining valuable knowledge.

• Preferably have knowledge of machine learning techniques, especially related to images.

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Inclusion and diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

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